Kirigami Electrothermal MEMS Actuator
- MEMS-scale bimorph actuators with large deformation
- High-precision in-plane and out-of-plane motion
- Applications to micro manipulation
https://doi.org/10.1088/1361-6439/ada164
Soft Thermal-Driven Microrobot
- Femtosecond laser carbonization creates soft thermal bimorph actuators.
- Carbonized PDMS enables fast photothermal bending.
- Demonstrates 40 ms response and 3D insect-inspired actuation.
https://ieeexplore.ieee.org/document/11110822
4D Electrothermal Soft Microactuator
- Femtosecond laser carbonization creates soft thermal bimorph actuators.
- Carbonized PDMS enables fast photothermal bending.
- Demonstrates 40 ms response and 3D insect-inspired actuation.